Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
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چکیده
منابع مشابه
Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitat...
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ژورنال
عنوان ژورنال: Sensors
سال: 2015
ISSN: 1424-8220
DOI: 10.3390/s151027047